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Operating Modes

• C-DLTS
• CC-DLTS
• I-DLTS
• DD-DLTS
• Zerbst-DLTS
• O-DLTS
• FET-Analysis
• MOS-Analysis
• ITS (Isothermal Transient Spectroscopy)
• Trap Profiling
• Capture Cross Section Measurement
• I/V,I/V(T) Richardson Plot
• C/V, C/V(T)
• TSCAP
• PITS (Photon Induced Transient Spectroscopy)
• DLOS (Special system)

Load PDF-file for program structure and some key features.