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Principles

The determination of the electrical properties (resistivity, carrier concentration and mobility) of various materials and layers employs the van der Pauw and Hall methods.

Using a square shaped sample with small contacts at the corners, the resistivity is given by

Starting from

the Hall coefficient R_H is defined by

with	F	:	correction factor
	D	:	thickness
	RI / U	:	four point resistance of the sample
	RI / UB	:	Hall resistance at magnetic field B
	1, 2, 3, 4	:	clockwise counted sample contacts

Carrier concentration, mobility and the carrier type are now obtained using

Assuming

leads to

with	n, p	:	carrier concentration
	µn, p	:	carrier mobility
	b	:	= µn / µp

For

similar expressions with positive sign result.

References

[1]	R.N. Hall, Phys. Rev., 87, 387 (1952)
[2]	L.J. van der Pauw, Philips Res. Rep., 13, 1 (1958)
[3]	L. Cohausz, Ph.D. Thesis, Kassel 1987